Applied Physics Letters · 1990 · 31 citations · 16 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramic MaterialsElectronic MaterialsThin FilmsLaser Surface ProcessingSemiconductor Device MaterialsSemiconductor SurfacesSuperconducting MaterialsSuperconducting Thin FilmsThin-film DepositionCuprate SuperconductorsLaser AblationProcess Parameter EffectsProcess Parameter OptimizationPulsed Laser DepositionSingle-crystal SiliconSuperconducting PropertiesThin-film Superconductors
The pulsed excimer laser ablation method is used to deposit both the buffer layer of Y-stabilized ZrO2 and the overlayer of Y1Ba2Cu3O7−x superconductor on (100) oriented single-crystal silicon. Process parameter optimization study is carried out and it is shown that a thin film of the superconductor (0.5–0.7 μm) having a zero resistance temperature of 86 K can be obtained using a 0.3 μm buffer layer deposited at substrate temperatures between 600 and 800 °C.
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Low-temperature preparation of high <i>T</i> <i>c</i> superconducting thin films
X. D. Wu, A. Inam, T. Venkatesan et al. · Applied Physics Letters · 1988 · 235 citations
High-temperature superconductivity in ultrathin films of Y1Ba2Cu3O7−<i>x</i>
T. Venkatesan, X. D. Wu, B. Dutta et al. · Applied Physics Letters · 1989 · 219 citations