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C-rich micro/mesoporous Si(B)OC: In situ diffraction analysis of the HF etching process

Materials ScienceMolecular SieveEngineeringNanoporous MaterialMicrofabricationSurface ScienceApplied PhysicsSitu Diffraction AnalysisHf Etching ProcessSilicon On InsulatorPlasma EtchingC-rich Micro/mesoporous Si