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Combining grazing incidence X-ray diffraction and X-ray reflectivity for the evaluation of the structural evolution of HfO2 thin films with annealing

Materials ScienceIncidence X-ray DiffractionMaterial AnalysisEngineeringSurface ScienceApplied PhysicsX-ray ReflectivityThin FilmsMolecular Beam EpitaxyEpitaxial GrowthCrystallographyHfo2 Thin FilmsThin Film Processing