Publication | Open Access
Instantaneous and delayed responses of line intensities to interruption of the RF power in an argon inductively coupled plasma
79
Citations
26
References
1991
Year
Electrical EngineeringEngineeringApplied Plasma PhysicFundamental Plasma PhysicMagnetohydrodynamicsComputational ElectromagneticsLine IntensitiesRf PowerPlasma ApplicationDelayed ResponsesElectromagnetic Compatibility
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