<title>MEMS reliability, characterization, and test</title>

Abstract

Successful production of MEMS devices in a volume-manufacturing environment requires high reliability, efficient process and product characterization, and cost-effective testing capabilities. Integration of process engineering, design, yield engineering, reliability, characterization and test from the early development phases through to product release and into manufacturing is an effective model for success in the MEMS industry. An integrated process/product approach utilizing quality systems and high volume manufacturing is critical to producing a reliable part; proper data collection, careful interpretation and fast feedback are the backbone of a stable fabrication and product line. Elimination of process and design-related failure mechanisms through statistical analysis and understanding of physics of failure, and a well-executed defect reduction program will result in a high yielding, profitable and reliable production line. Accurate characterization and testing of MEMS mechanical structures and electrical circuitry on one chip requires understanding the complex interactions of electro-mechanical behavior. This model of efficient production and test for a reliable cost-effective product is not new, however, successful application of this model to high volume MEMS manufacturing is not common. The continuous dedication of a talented, versatile, and experienced workforce is required to make this a reality.