Preparation of whiskers and spring-like fibres of Si3N4 by impurity-activated chemical vapour deposition

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Deposition and microhardness of SiC from the Si2Cl6-C3H8-H2-Ar system Seiji Motojima, Noriyuki Iwamori, Tatsuhiko Hattori, Journal of Materials Science Materials ScienceMaterials EngineeringEngineeringApplied PhysicsCarbide	1986	19

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