Publication | Closed Access

Chemical vapour growth of β-SiC whiskers from a gas mixture of Si2Cl6-CH4-H2-Ar

Materials ScienceMaterials EngineeringEngineeringβ-Sic WhiskersSurface ScienceApplied PhysicsGas MixtureChemistryChemical VapourChemical KineticsChemical Vapor DepositionCarbide