Publication | Closed Access
Full wafer scale nanoimprint lithography for GaN-based light-emitting diodes
24
Citations
26
References
2010
Year
Electrical EngineeringEngineeringNanoelectronicsApplied PhysicsAluminum Gallium NitrideGan Power DeviceNanolithographyScale Nanoimprint LithographyOptoelectronicsNanolithography Method
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