Publication | Closed Access
Structure quality in deep X-ray lithography applying commercial polyimide-based masks
17
Citations
3
References
2006
Year
Materials ScienceEngineeringHealth SciencesElectron-beam LithographyMicrofabricationBeam LithographyX-ray DiffractionApplied PhysicsDeep X-ray LithographyPolycapillary OpticsX-ray OpticNanolithography MethodX-ray Imaging
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