Publication | Closed Access
Spray coating of PMMA for pattern transfer via electron beam lithography on surfaces with high topography
26
Citations
7
References
2011
Year
Materials ScienceEngineeringHigh TopographyElectron-beam LithographyMicrofabricationBeam LithographySurface ScienceApplied PhysicsPattern TransferSpray CoatingSurface ProcessingNanolithography Method
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