Optics Express · 2011 · 20 citations · 10 references
EngineeringMaterials ScienceMechanical EngineeringMicroelectromechanical SystemsPhotonicsSensorsForce SensingForce SensorsMems CharacterizationMems SensorsMicroelectromechanical SensorsOptical MemsAll-optical ModulationAll-optical ModulatorsBragg Grating SensorsFiber-optic Force SensorsMicroelectromechanical Force SensorsMicroscale Force MeasurementOptical Force SensorsWaveguide Integration
We present modeling, design, fabrication and characterization of a new type of all-optical frequency modulated MEMS force sensor based on a mechanically amplified double clamped waveguide beam structure with integrated Bragg grating. The sensor is ideally suited for force measurements in harsh environments and for remote and distributed sensing and has a measured sensitivity of -14 nm/N, which is several times higher than what is obtained in conventional fiber Bragg grating force sensors.
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Integrated optical waveguides with liquid cores
Dulin Yin, David W. Deamer, Holger Schmidt et al. · Applied Physics Letters · 2004 · 104 citations