Optical filters fabricated in hybrimer media with soft lithography

Abstract

Fabrication and characterization of guided-mode resonance filters made by soft lithography are presented. As these resonant elements are highly sensitive to parametric variations, it is important to develop methods for their reliable fabrication. Thus, we provide a fabrication process that is consistent and simple, employing an elastomeric mold and a UV-curable organic-inorganic hybrid material. Measured spectra show approximately 81% reflectance and approximately 8% transmittance at a resonance wavelength of 1538 nm. The filter's linewidth is approximately 4.5 nm, and the sideband reflectance is approximately 5%. Experimental and theoretical results are in good agreement.