Applied Physics Letters · 2004 · 33 citations · 15 references
EngineeringBioengineeringMaterials ScienceMembrane ScienceMicrofabricationSurface ScienceBiological MembranesLipid BilayersMembrane EngineeringMembrane FabricationMembrane MaterialsMembrane ProteinsBiomimetic MembranesCleanroom ApplicationsLipid Bilayer ArchitectureLipid Bilayer MembranesNanoporous MembranesSiliconSilicon Wafer ProcessingSupported Lipid Bilayers
We present a method for microfabricating apertures in a silicon substrate using well-known cleanroom technologies resulting in highly reproducible giga-seal resistance bilayer formations. Using a plasma etcher, 150μm apertures have been etched through a silicon wafer. Teflon™ has been chemically vapor deposited so that the surface resembles bulk Teflon and is hydrophobic. After fabrication, reproducible high resistance bilayers were formed and characteristic measurements of a self-inserted single OmpF porin ion channel protein were made.
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