Phase diagrams for CVD diamond deposition from halogen-containing gas phase

Diamond deposition technologies

Peter K. Bachmann, Willem van Enckevort · Diamond and Related Materials · 1992 · 124 citations

Direct deposition of polycrystalline diamond films on Si(100) without surface pretreatment

R. A. Rudder, G. Hudson, J. B. Posthill et al. · Applied Physics Letters · 1991 · 72 citations

Natural Sciences, Materials Engineering, Materials Science +15

Pressure effect on diamond nucleation in a hot-filament CVD system

S. T. Lee, Yun Wah Lam, Zhangda Lin et al. · Physical review. B, Condensed matter · 1997 · 61 citations

Natural Sciences, Materials Engineering, Materials Science +14

Diamond deposition from halogenated methane reactants in a hot-filament chemical vapor deposition reactor

Franklin Chau‐Nan Hong, Gou-Tsau Liang, Jih‐Jen Wu et al. · Applied Physics Letters · 1993 · 48 citations

Natural Sciences, Chemistry, Materials Science +15

Diamond deposition from CF4-H2 mixed gas by microwave plasma

M. Kadono, Takayoshi Inoue, Akiharu Miyanaga et al. · Applied Physics Letters · 1992 · 48 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +9