Concepedia

M. Kadono

MK

Statistics

Publications

2

Citations

58

H-Index

2

Active since

1992

Affiliations

Semiconductor Energy Laboratory (Japan)(Current)

M. Kadono is an author at Semiconductor Energy Laboratory (Japan) specializing in materials science, secondary ion mass spectrometry, and natural sciences.

Publications per year

1992–1993

2

Publications

2

Diamond deposition from CF4-H2 mixed gas by microwave plasma

M. Kadono, Takayoshi Inoue, Akiharu Miyanaga et al. · Applied Physics Letters · 1992 · 48 citations · Full text

, , +9

CH<sub>3</sub>OH Concentration and Total Pressure Dependence of Diamond Films Formed from CH<sub>3</sub>OH-H<sub>2</sub> Mixed Gas by Magnet-Active Microwave Plasma Chemical Vapor Deposition

M. Kadono, Tohru Inoue, Akiharu Miyanaga et al. · Japanese Journal of Applied Physics · 1993 · 10 citations

, , +12

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