Sensors and Actuators A Physical · 2012 · 15 citations · 20 references
EngineeringElectrical EngineeringMaterials ScienceActuatorsMicroelectromechanical SystemsMicroelectronicsDielectricsElectrostatic ActuationMems ActuatorsMems DesignMems MaterialsMicrowave FiltersLithium NiobateMems Filter DesignMems FiltersRf Mems Variable CapacitorsTunable CapacitorsTunable Filters
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Tatsuya Omori, Kenji Matsuda, N. Yokoyama et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2007 · 70 citations
Engineering, Electrical Engineering, Microelectromechanical Systems +7