Wideband tunable Love wave filter using electrostatically actuated MEMS variable capacitors integrated on lithium niobate

Toshiki Yasue, Tomoya Komatsu, Nobuyuki Nakamura, Ken-ya Hashimoto, Hideki Hirano, Masayoshi Esashi, Shuji Tanaka

Sensors and Actuators A Physical · 2012 · 15 citations · 20 references

Concepts

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