Journal of Applied Physics · 1999 · 109 citations · 10 references
Natural SciencesMaterials EngineeringMaterials ScienceMagnetic MaterialsMicrofabricationNanotechnologyFerromagnetic MaterialsMagnetic DomainsMagnetic NanomaterialsMagnetic Recording MaterialsMagnetic Thin FilmsNanomagnetismNanoparticle ArraysNanostructured Magnetic MaterialsParticle InteractionsParticle-particle InteractionsPatterned Media Fabrication
A method is presented for the fabrication of large-area arrays of magnetic particles with 100 nm period, using achromatic interferometric lithography combined with etching, electrodeposition, or an evaporation and liftoff processes. These “nanomagnet” arrays have applications in patterned magnetic media, in magnetic memories, and for studies of particle interactions.
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Optically matched trilevel resist process for nanostructure fabrication
Mark L. Schattenburg, Richard Aucoin, Robert C. Fleming · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 85 citations
Natural Sciences, Materials Engineering, Materials Science +15