Publication | Closed Access
Thermoelastic deformations of masks for deep X-ray lithography
15
Citations
4
References
1995
Year
Materials ScienceEngineeringBeam LithographyElectron-beam LithographyFabrication TechniqueSolid MechanicsMechanics Of MaterialsDeep X-ray LithographyElectronic Packaging3D PrintingMicrostructure
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