Concepedia

Capacitively coupled r.f. plasma sources: a viable approach for CVD diamond growth?

Judith Beckman, Richard B. Jackman, John S. Foord

Diamond and Related Materials · 1994 · 13 citations · 26 references

DOI

Concepts

References

26

Characterization of diamond films by Raman spectroscopy

Diane S. Knight, William B. White · Journal of materials research/Pratt's guide to venture capital sources · 1989 · 2.5K citations

, , +13

Review of inductively coupled plasmas for plasma processing

Jeffrey Hopwood · Plasma Sources Science and Technology · 1992 · 678 citations

, , +17

Synthesis of diamonds by use of microwave plasma chemical-vapor deposition: Morphology and growth of diamond films

Koji Kobashi, Kozo Nishimura, Yoshio Kawate et al. · Physical review. B, Condensed matter · 1988 · 484 citations

, , +14

Positive-ion bombardment of substrates in rf diode glow discharge sputtering

J. W. Coburn, E. Kay · Journal of Applied Physics · 1972 · 421 citations

, , +13

Transition between different regimes of rf glow discharges

Ph. Belenguer · Physical Review A · 1990 · 362 citations

, , +16