Focused-ion-beam micromachined AlGaAs semiconductor laser mirrors

J. Puretz, Richard K. DeFreez, Richard A. Elliott, J. Orloff

Electronics Letters · 1986 · 43 citations · 0 references

Concepts

Abstract

A V-channel substrate inner stripe diode laser with conventional cleaved facet mirrors has been modified by micro-machining with a focused ion beam to produce a smooth machined output mirror with no change in its lasing threshold and only a small decrease in its external differential quantum efficiency.