Vapour-etching-based porous silicon: a new approach - Concepedia

Concepedia

Publication | Closed Access

Vapour-etching-based porous silicon: a new approach

92

Citations

7

References

2002

Year

M. Saadoun, N. Mliki, H Kaabi, Kais Daoudi, B. Bessaı̈s, Hatem Ezzaouia, R. Bennaceur

Thin Solid Films

EngineeringMicrofabricationSurface ScienceApplied PhysicsSemiconductor Device FabricationVapour-etching-based Porous SiliconSilicon On InsulatorMicroelectronicsPlasma Etching

References

	Year	Citations

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