Thin Solid Films · 2002 · 92 citations · 7 references
EngineeringMaterials EngineeringMaterials ScienceSemiconductor DevicesSemiconductor MaterialsSurface EngineeringChemical Vapor DepositionEtching ProcessesPhysical Vapor DepositionPorous MaterialsSemiconductor Device MaterialsSilicon MaterialsEtchingPorous SiliconVapor Phase EtchingWet Chemical EtchingWet Etching
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Porous silicon formation by stain etching
É. Vázsonyi, E. Szilágyi, P. Petrík et al. · Thin Solid Films · 2001 · 97 citations