Preparations of ZnO:Al transparent conducting films by d.c. magnetron sputtering - Concepedia

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Preparations of ZnO:Al transparent conducting films by d.c. magnetron sputtering

140

Citations

16

References

1990

Year

Tadatsugu Minami, Katsuki Oohashi, S. Takata, T. Mouri, N. Ogawa

Thin Solid Films

Materials ScienceMaterials EngineeringAluminium NitrideEngineeringOxide ElectronicsSurface ScienceApplied PhysicsThin FilmsD.c. Magnetron SputteringChemical DepositionThin Film Processing

References

	Year	Citations

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