Depth-profile analysis of thermoelectric layers on Si wafers by pulsed r.f. glow discharge time-of-flight mass spectrometry

Klaus-Georg Reinsberg, Christian Schumacher, A. Tempez, Kornelius Nielsch, J. A. C. Broekaert

Spectrochimica Acta Part B Atomic Spectroscopy · 2012 · 18 citations · 18 references

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