Effects of gap width on vacuum-ultraviolet transmission through submicrometer-period, freestanding transmission gratings

Abstract

The effects of gap width on the transmission coefficient of vacuum-ultraviolet light through submicrometer-period, freestanding transmission gratings are reported. Results from computations and an analytical waveguide model are shown to be consistent with experimental measurements. These results show that thin gratings with narrow gaps and thick gratings with wide gaps are equally effective at eliminating 121.6-nm radiation. The thin gratings with the narrow gaps have the advantage of better attenuation of shorter-wavelength radiation than the thick gratings with the larger gaps.