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The UV-nanoimprint lithography equipment with multi-head imprinting unit for sub-50nm half-pitch patterns

EngineeringElectron-beam LithographyBeam LithographyMicroscopyMicrofabricationUv-nanoimprint Lithography EquipmentPattern TransferPrinted ElectronicsBiomedical EngineeringNanofabricationSub-50nm Half-pitch PatternsMicroelectronics3D PrintingNanolithography Method