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The scattering of electrons by surface oxide charges and by lattice vibrations at the silicon-silicon dioxide interface

EngineeringPhysicsSurface Oxide ChargesNanoelectronicsSilicon-silicon Dioxide InterfaceSurface ScienceCondensed Matter PhysicsApplied PhysicsSemiconductor MaterialCharge Carrier TransportMicroelectronicsCharge TransportSilicon On InsulatorLattice Vibrations