Influence of substrate temperature on morphology of SiOx films deposited on particles by PECVD

High Rate Thick Film Growth

John A. Thornton · Annual Review of Materials Science · 1977 · 2.1K citations

Natural Sciences, Materials Engineering, Materials Science +12

Revised structure zone model for thin film physical structure

R. Messier, Anupam Giri, R. Roy · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 945 citations

Natural Sciences, Materials Science, Physics +12

Transparent barrier coatings on polyethylene terephthalate by single- and dual-frequency plasma-enhanced chemical vapor deposition

Argemiro Soares da Silva Sobrinho, M. Latrèche, G. Czeremuszkin et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 255 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

SiO_x Gas Barrier Coatings on Polymer Substrates:  Morphology and Gas Transport Considerations

Ahmet Gün Erlat, Richard J. Spontak, Rosalind Clarke et al. · The Journal of Physical Chemistry B · 1999 · 232 citations

Natural Sciences, Materials Engineering, Materials Science +17

Toward quantification of thin film morphology

R. Messier · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 206 citations

Natural Sciences, Materials Engineering, Materials Science +14