Concepedia

Depth of origin of sputtered atoms for elemental targets

V.I. Shulga, W. Eckstein

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1998 · 64 citations · 24 references

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Concepts

References

24

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

, , +13

Computer simulation of atomic-displacement cascades in solids in the binary-collision approximation

Mark T. Robinson, Ian M. Torrens · Physical review. B, Solid state · 1974 · 1.6K citations

, , +17

Energy Dissipation by Ions in the kev Region

J. Lindhard, M. Scharff · Physical Review · 1961 · 1.4K citations

, , +12

Sputtering studies with the Monte Carlo Program TRIM.SP

J.P. Biersack, W. Eckstein · Applied Physics A · 1984 · 916 citations

, , +8

Calculations of nuclear stopping, ranges, and straggling in the low-energy region

W. D. Wilson, L.G. Haggmark, J.P. Biersack · Physical review. B, Solid state · 1977 · 810 citations

, , +14