Deposition of chromium nitride coatings using vacuum arc plasma in increased negative substrate bias voltage - Concepedia

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Deposition of chromium nitride coatings using vacuum arc plasma in increased negative substrate bias voltage

60

Citations

32

References

2015

Year

G.N. Tolmachova, І.V. Kolodiy, A. Gilewicz, O. Łupicka, J. Rochowicz, B. Warcholiński

Materials EngineeringMaterials ScienceEngineeringVacuum Arc PlasmaSurface ScienceApplied PhysicsChromium Nitride CoatingsVacuum DeviceGas Discharge PlasmaChemical Vapor DepositionPlasma Processing

References

	Year	Citations

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