Publication | Closed Access
New Nb multi-layer fabrication process for large-scale SFQ circuits
70
Citations
11
References
2009
Year
3D Ic ArchitectureElectrical EngineeringWafer Scale ProcessingEngineeringAdvanced Packaging (Semiconductors)MicrofabricationNanoelectronicsElectronic PackagingMicroelectronicsLarge-scale Sfq Circuits
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