Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation

S. Nagasawa, K. Hinode, T. Satoh, +6

IEICE Transactions on Electronics

Sr ChipSuperconducting MaterialEngineeringInterconnect (Integrated Circuits)Semiconductor Device +16

100 GHz Demonstrations Based on the Single-Flux-Quantum Cell Library for the 10 kA/cm2 Nb Multi-Layer Process

Yuki Yamanashi, Toshiki Kainuma, Nobuyuki Yoshikawa, +7

IEICE Transactions on Electronics

Single-flux-quantum Cell LibraryEngineeringVlsi DesignComputer ArchitectureJosephson Junction +16

Quasiparticle-mediated spin Hall effect in a superconductor

Taro Wakamura, Hiroyuki Akaike, Yasutomo Omori, +5

Nature Materials

MagnetismSpintronicsSuperconducting MaterialEngineeringPhysics +7

New Nb multi-layer fabrication process for large-scale SFQ circuits

S. Nagasawa, T. Satoh, K. Hinode, +7

Physica C Superconductivity

3D Ic ArchitectureElectrical EngineeringWafer Scale ProcessingEngineeringAdvanced Packaging (Semiconductors) +5

Development of advanced Nb process for SFQ circuits

S. Nagasawa, K. Hinode, T. Satoh, +3

Physica C Superconductivity

Electrical EngineeringEngineeringCircuit SystemCircuit DesignSfq Circuits +3

Fabrication Process of Planarized Multi-Layer Nb Integrated Circuits

T. Satoh, K. Hinode, Hiroyuki Akaike, +3

IEEE Transactions on Applied Superconductivity

Superconducting MaterialEngineeringMechanical-polishing PlanarizationIntegrated CircuitsInterconnect (Integrated Circuits) +17

Large-Scale Integrated Circuit Design Based on a Nb Nine-Layer Structure for Reconfigurable Data-Path Processors

Akira Fujimaki, Masamitsu Tanaka, R. Kasagi, +9

IEICE Transactions on Electronics

EngineeringVlsi DesignComputer ArchitectureIntegrated CircuitsNb Nine-layer Structure +21

Demonstration of a 120 GHz single-flux-quantum shift register circuit based on a 10 kA cm⁻²Nb process

Hiroyuki Akaike, Takahiro Yamada, Akira Fujimaki, +5

Superconductor Science and Technology

Electrical EngineeringPlanarized 10Quantum ComputingPhysicsQuantum Technology +12

100-GHz Single-Flux-Quantum Bit-Serial Adder Based on 10-${\rm kA/cm}^{2}$ Niobium Process

Masamitsu Tanaka, Hiroyuki Akaike, Akira Fujimaki, +5

IEEE Transactions on Applied Superconductivity

EngineeringVlsi DesignComputer ArchitectureIntegrated CircuitsQuantum Computing +18

Planarized multi-layer fabrication technology for LTS large-scale SFQ circuits

S. Nagasawa, K. Hinode, Masao Sugita, +4

Superconductor Science and Technology

Materials EngineeringElectrical EngineeringWafer Scale ProcessingKa Cm−2 NbEngineering +13