Publication | Closed Access
Chemical planarization of GaN using hydroxyl radicals generated on a catalyst plate in H2O2 solution
55
Citations
15
References
2007
Year
Chemical EngineeringEngineeringApplied PhysicsAluminum Gallium NitrideGan Power DeviceCatalyst PlateCatalysisHydrogenChemistryChemical PlanarizationCategoryiii-v SemiconductorCatalytic SynthesisHydroxyl Radicals
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