Publication | Open Access
The metrology of a miniature FT spectrometer MOEMS device using white light scanning interference microscopy
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Citations
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References
2004
Year
Precision MeasurementEngineeringAnalytical InstrumentationMicroscopyMeasurementSpectroscopyMicroscopy MethodApplied PhysicsOptical TestingEducationInterference MicroscopyInstrumentationMetrology
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