Sensitivity of a Lamb wave sensor with 2μm AlN membrane

References

Page 1

	Year	Citations
Acoustic wave sensors. Theory, design and physicochemical applications Michael J. Vellekoop Sensors and Actuators A Physical Acoustic MethodsAcoustic Wave SensorsEngineeringEngineering AcousticSensors	1997	541
Lamb wave and plate mode in ZnO/silicon and AlN/silicon membrane - Application to sensors able to operate in contact with liquid Thierry Laurent, François O Bastien, Jean-Claude Pommier, HAL (Le Centre pour la Communication Scientifique Directe) EngineeringMechanical EngineeringAcoustic SensorSensor TechnologyAln/silicon Membrane	2000	66
Surface Acoustic Wave Sensors R.M. White AeroacousticsEngineeringSensorsAcoustic SensorUltrasound	1985	60
Lamb wave and plate mode in ZnO/silicon and AlN/silicon membrane Thierry Laurent, François O Bastien, Jean-Claude Pommier, Sensors and Actuators A Physical Materials EngineeringMaterials ScienceEngineeringMicrofabricationMechanical Engineering	2000	60
Lamb waves pressure sensor using an AlN/Si structure N. Tirole, Abdelkrim Choujaa, D. Hauden, EngineeringMechanical EngineeringSensor TechnologyInstrumentationThin Membrane	1993	31
Investigations on temperature controlled monolithic integrated surface acoustic wave (SAW) gas sensors Stefan Bender, Franz L. Dickert, W. Mokwa, Sensors and Actuators B Chemical EngineeringSensorsGas SensorMechanical EngineeringAcoustic Sensor	2003	28
Temperature-compensated Love-wave sensors on quartz substrates Bernhard Jakoby, J. Bastemeijer, Michael J. Vellekoop Sensors and Actuators A Physical EngineeringSensorsApplied PhysicsTemperature-compensated Love-wave SensorsSensor Design	2000	22
Investigations on excitation and detection methods for Lamb wave sensors Yihui Wu, M. de Labachelerie, F. Bastien Sensors and Actuators A Physical Sensor ApplicationEngineeringSensorsTransducer PrincipleStructural Health Monitoring	2002	15

Page 1