Sensitivity of a Lamb wave sensor with 2μm AlN membrane

Acoustic wave sensors. Theory, design and physicochemical applications

Michael J. Vellekoop · Sensors and Actuators A Physical · 1997 · 541 citations

Natural Sciences, Materials Science, Physics +14

Lamb wave and plate mode in ZnO/silicon and AlN/silicon membrane - Application to sensors able to operate in contact with liquid

Thierry Laurent, François O Bastien, Jean-Claude Pommier et al. · HAL (Le Centre pour la Communication Scientifique Directe) · 2000 · 66 citations

Engineering, Electrical Engineering, Materials Science +13

Surface Acoustic Wave Sensors

R.M. White · 1985 · 60 citations

Natural Sciences, Materials Science, Physics +14

Lamb wave and plate mode in ZnO/silicon and AlN/silicon membrane

Thierry Laurent, François O Bastien, Jean-Claude Pommier et al. · Sensors and Actuators A Physical · 2000 · 60 citations

Natural Sciences, Materials Engineering, Materials Science +14

Lamb waves pressure sensor using an AlN/Si structure

N. Tirole, Abdelkrim Choujaa, D. Hauden et al. · 1993 · 31 citations

Engineering, Materials Engineering, Materials Science +17