Analysis of copper grains in damascene trenches after rapid thermal processing or furnace anneals - Concepedia

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Analysis of copper grains in damascene trenches after rapid thermal processing or furnace anneals

24

Citations

9

References

2002

Year

Qing-Tang Jiang, Matt Nowell, Brendan Foran, A. Frank, Robert Havemann, V. Parihar, R. Augur, J. D. Luttmer

Journal of Electronic Materials

Materials ScienceEngineeringDamascene TrenchesCivil EngineeringGeologyThermochronologySedimentologyCopper GrainsRapid Thermal Processing

References

	Year	Citations

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