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Microcrystalline silicon growth by the layer-by-layer technique: long term evolution and nucleation mechanisms

Materials ScienceEngineeringMicrofabricationMicrocrystalline Silicon GrowthCrystal Growth TechnologySurface ScienceApplied PhysicsNucleation MechanismsSiliceneLong Term EvolutionSemiconductor Device FabricationSilicon On InsulatorEpitaxial GrowthMicrostructure