Publication | Closed Access

Macro and microsurface morphology reconstructions during laser-induced etching of silicon

Advanced Laser ProcessingEngineeringMicrofabricationMicroscopySurface ScienceApplied PhysicsLaser ApplicationsLaser Processing TechnologyMicrosurface Morphology ReconstructionsLaser-assisted DepositionSilicon On InsulatorLaser-surface InteractionsPlasma Etching