Soft x-ray reflection from SiC, TiC, and WC mirrors

Abstract

The optical constants of SiC, TiC, and WC in the soft x-ray region (80–1200 eV) derived from the incidence-angle dependence of the specular reflectance are reported. The angular dependence of the specular intensity can be explained by simple scattering theory with a Gaussian distribution of the surface roughness in the soft x-ray wavelength range.