Preserving InP surface corrugations for 1.3 μm GaInAsP/InP DFB lasers from thermal deformation during LPE process

Abstract

First-order InP surface corrugations for 1.3 μm distributed feedback (DFB) GaInAsP/InP lasers have been effectively preserved from thermal deformation that occurred during the soaking period just before LPE growth by employing a GaAs cover instead of a conventional InP cover. This technique has contributed greatly to GaInAsP/InP DFB laser reproducible fabrication.