Publication | Closed Access
Geometrical properties of multilayer nano-imprint-lithography molds for optical applications
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Citations
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References
2012
Year
Materials ScienceEngineeringBeam LithographyMicrofabricationNanomaterialsNanotechnologyFabrication TechniqueApplied PhysicsMultilayer Nano-imprint-lithography MoldsNanolithography3D PrintingNanolithography Method
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