Publication | Closed Access
Fabrication of ZrO2 nanopatterns for biomimetic antireflection by thermal nanoimprint lithography
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Citations
19
References
2012
Year
Materials ScienceChemical EngineeringNano ApplicationEngineeringBeam LithographyMicrofabricationNanotechnologyNanomaterialsNanolithographyNanofabricationNanostructure SynthesisZro2 NanopatternsBiomimetic AntireflectionNanometrologyNanolithography MethodThermal Nanoimprint Lithography
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