Stacking-Fault Contrast in X-Ray Topographs of Annealed Si Web Dendrite

Abstract

X-ray topographs of annealed Si web dendrite showed the presence of immense stacking faults lying parallel to the web surface. In all cases, the faults were bounded by 〈112〉 partial dislocations, which formed many unusual and complex dislocation networks. In many areas, both extrinsic and intrinsic stacking faults were observed in a single (111) plane, along with nonfaulted crystal regions. The fault and dislocation contrast were generally explainable in terms of dynamical diffraction theory.