Formation of Bismuth Strontium Calcium Copper Oxide Superconducting Films by Chemical Vapor Deposition

Abstract

Superconducting films of bismuth strontium calcium copper oxides were prepared by chemical vapor deposition at 910°C and 1 Torr on MgO substrate using a bismuth alkoxide and β-diketonate chelates of Sr, Ca and Cu as source materials. In the film with T c(zero) of 78 K, the predominant phase was Bi 2 (Sr, Ca) 3 Cu 2 O x with the c -axis perpendicular to the substrate.