Magnetron Sputtering of Bi-Ca-Sr-Cu-O Thin Films with Superconductivity above 80 K

Abstract

Superconducting Bi-Ca-Sr-Cu-O thin films on (100) MgO were prepared by rf magnetron sputtering from a sintered Bi 1 Ca 1 Sr 1 Cu 2 O x target. Post-annealing after sputtering resulted in superconducting films with a resistance anomaly around 110 K and zero resistance at 80 K. X-ray diffraction patterns indicated a preferential orientation, where the c axis of a fourfold stacked perovskite, with a lattice constant c =15.38 Å, is perpendicular to the substrate plane.