Sputter Deposition of BiSrCaCuO Thin Films

Abstract

The sputter deposition of superconducting Bi-Sr-Ca-Cu-O thin films was studied with particular reference to the relation between the deposition conditions and the superconducting properties of the films obtained. After annealing, the films sputtered from a sintered Bi 1.3 Sr 1 Ca 1 Cu 1.5 O x target exhibited superconductivity with zero-resistance at 83 K. The possibility of obtaining high- T c superconducting film without post-deposition annealing was also demonstrated.