International Journal of Mass Spectrometry and Ion Processes · 1995 · 127 citations · 2 references
EngineeringElectrical EngineeringPhysicsElectronic MaterialsMetrologySemiconductor DevicesDevice CharacterizationDevice ModelingDevice SimulationIii-v SemiconductorsSemiconductor DefectsSemiconductor PhysicsDiamond SemiconductorsSilicon CharacterizationSingle-element Quantification
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Secondary Ion Mass Spectrometry
Analytica Chimica Acta · 1993 · 1.1K citations
Secondary ion mass spectrometry
C. Kenway-Jackson · Vacuum · 1984 · 51 citations