Use of low-energy, high-current electron beams for surface treatment of materials

Pulsed-electron-beam annealing of ion-implantation damage

Anton C. Greenwald, A. R. Kirkpatrick, R. Little et al. · Journal of Applied Physics · 1979 · 98 citations

Engineering, Materials Engineering, Materials Science +13

The effect of pulsed electron-beam treatment of electrodes on vacuum breakdown

A. V. Batrakov, A. B. Markov, G. E. Ozur et al. · IEEE Transactions on Dielectrics and Electrical Insulation · 1995 · 27 citations

Natural Sciences, Electrical Engineering, Physics +14

Pulsed electron beam for silicon annealing

G. Leggieri, A. Luches, V. Nassisi et al. · Vacuum · 1982 · 11 citations

Engineering, Materials Engineering, Materials Science +10