Publication | Closed Access
Use of low-energy, high-current electron beams for surface treatment of materials
114
Citations
3
References
1997
Year
Materials EngineeringMaterials ScienceEngineeringElectron-beam LithographyHigh-current Electron BeamsSurface ScienceApplied PhysicsElectron DiffractionIon BeamSurface TreatmentElectron Optic
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