Pulsed electron beam for silicon annealing

Laser annealing of boron-implanted silicon

R. T. Young, C. W. White, G. J. Clark et al. · Applied Physics Letters · 1978 · 223 citations

Engineering, Materials Engineering, Materials Science +17

Dynamics of laser-induced formation of palladium silicide

M. von Allmen, M. Wittmer · Applied Physics Letters · 1979 · 55 citations

Engineering, Materials Engineering, Materials Science +17

Compounds in the Pd-Si and Pt-Si system obtained by electron bombardment and post-thermal annealing

G. Majni, F. Nava, G. Ottaviani et al. · Journal of Applied Physics · 1981 · 25 citations

Engineering, Materials Engineering, Materials Science +17