Publication | Closed Access
Growth of extremely uniform III–V compound semiconductor layers by LP-MOVPE by application of the gas foil technique for substrate rotation
13
Citations
3
References
1991
Year
SemiconductorsMaterials ScienceSubstrate RotationGas Foil TechniqueEngineeringSurface ScienceApplied PhysicsSemiconductor MaterialThin FilmsEpitaxial GrowthCompound SemiconductorChemical Vapor Deposition
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