Publication | Closed Access
Oxygen annealing modification of conduction mechanism in thin rf sputtered Ta2O5 on Si
65
Citations
17
References
2002
Year
Materials ScienceMaterials EngineeringEngineeringNanoelectronicsOxide ElectronicsApplied PhysicsConduction MechanismSemiconductor MaterialSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsThin Rf
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